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While bridging with the theme of enabling technologies; we’ll provide an overview of current and future trends in microscopy and characterization methods that are pushing the boundary even beyond the nanoscale. Topics will include helium ion microscopy, a new form of microscopy that is redefining limits in secondary imaging and revealing new contrast mechanisms with benefits in materials analysis and metrology. Atom probe spectroscopy is another rapidly maturing technology allowing perhaps the ultimate in atomic scale elemental analysis on both conductors and insulators over volumes that now encompass an entire device. The trend toward lower voltage aberration corrected TEM (and even SEM) also has broad consequences for both imaging and analysis not only in materials science but in biological studies via technologies like Boersch phase plates. Hardware miniaturization through microfabrication is allowing commercial production of table-top SEM platforms with unprecedented capabilities which is an exciting trend also due to the accessibility it may allow to future educators and technologists. Finally, the hybrid platform of a focused ion beam (FIB) and SEM can extend state-of-the-art imaging and analytical methods into the third dimension via 3D reconstruction techniques such as FIB-EBSD and FIB-SEM to provide nanoscale resolution throughout the volume of a structure or device. The FIB-SEM platform is also a primary tool for nanopatterning, nanofabrication and prototyping. In the end it is hoped you’ll not only be current on some of the latest trends in microscopy and characterization but have a renewed appreciation for the wonder of what we are able to visualize in the world around us.
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