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Transactions on Semiconductor Manufacturing

Editor: Prof. Duane Boning
Massachusetts Institute of Technology
Dept. of Electrical Engineering and Computer Science
Microsystems Technology Laboratories
Room 39-567
60 Vassar Street
Cambridge, MA 02139 USA
telephone: +1-617-253-0931

Tables of Contents of Past Issues || Latest Issue

(Quarterly, 750 pages, about 120 papers)

Addresses innovations of interest to the integrated circuit manufacturing professional. Includes process and equipment control, simulation and modeling from the factory to the detailed process level. It also addresses defect control, yield analysis, production planning and scheduling, and the application of expert systems.

                                     Full Year      Half Year
       Non-Member Price              $435.00           --
       CPMT Member Price             $ 16.00         $8.00

You may review the past and upcoming Tables of Contents. To add Transactions on Semiconductor Manufacturing to your member benefits, or to subscribe as a non-member, call (in North America) 1-800-678-IEEE.

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