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Transactions on
Semiconductor Manufacturing
Tables of Contents of Past Issues ||
Latest Issue
(Quarterly, 750 pages,
about 120 papers)
Addresses innovations of interest to the integrated circuit manufacturing professional. Includes process and equipment control, simulation and modeling from the factory to the detailed process level. It also addresses defect control, yield analysis, production planning and scheduling, and the application of expert systems.
Full Year Half Year Non-Member Price $435.00 -- CPMT Member Price $ 16.00 $8.00
You may review the past and upcoming Tables of Contents. To add Transactions on Semiconductor Manufacturing to your member benefits, or to subscribe as a non-member, call (in North America) 1-800-678-IEEE.
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Webmaster: Paul Wesling || email to
Paul Wesling ||
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